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and pilot-line production services.
The Cleanroom V building, which is
part of a 30 million Euro investment
announced last year, will officially
open in August.
The new Cleanroom V building
is directly connected to EVG’s
existing cleanroom and applications
lab, and provides approximately
620 square meters of additional
Class 10 cleanroom floor space. The
new building also houses a modern
training center with multiple dedicated areas for training customers
and field service engineers on EVG
equipment platforms. As part of the
expansion investment, the existing
cleanroom and applications lab
facility have also been upgraded,
including the creation of redundant
systems to ensure the highest availability and new safety features.
The added capacity afforded by
the new Cleanroom V building
will strengthen the capabilities
of EVG’s NILPhotonics® Competence Center and Heterogeneous
Integration Competence Center™,
which provide world-class process
development services, and serve as
open access innovation incubators
for customers and partners across
the microelectronics supply chain.
Through these centers of technology
EV Group personnel are finalizing
the interior of the company’s
new state-of-the-art Cleanroom
V facility, which includes
dedicated co-development areas.
The facility will officially open in
August.
excellence, EVG helps customers to
accelerate technology development,
minimize risk, and develop differentiating technologies and products
through the implementation of
nanoimprint lithography and heterogeneous integration, respectively,
while guaranteeing the highest IP
protection standards that are required for working on pre-release
products.
“We are extremely proud of the
technical innovation and know-how
that went into the construction of this
new cleanroom. It is truly a worldclass, state-of-the-art facility down
to the smallest details—arguably
on par with some of the most technically advanced cleanrooms in
Europe,” stated Markus Wimplinger,
corporate technology development &
IP director at EV Group. “For EVG,
this new facility will greatly enhance
our ability to co-develop future
applications and technologies with
our customers. In particular, we see
it benefiting our competence centers,
which have seen particularly strong
activity and demand. The unique
services offered at our NILPhotonics
and Heterogeneous Integration
Competence Centers enable our
customers and partners to shorten
development cycles and create novel
products in these critical application
areas.”
With its technology competence
centers and strong customer partnerships, EVG is uniquely positioned to
provide uninterrupted process development services and support for its
customers. At the same time, EVG’s
local installation and support teams
as well as remote support capabilities enable continuous installation
and service operations of EVG’s
equipment.
EVG will showcase its complete
suite of wafer bonding, lithography
and resist processing solutions at
SEMICON West.
Microtronic Announces Real-time Macro
Defect Monitoring - Within Semiconductor
Processing Equipment
Microtronic, maker of high-speed
full-wafer macro defect inspection
systems and software, has just
announced an innovative new way
to automatically detect and manage
www.semiconductordigest.com
wafer processing defects, beginning
at the source – from inside specific
types of processing tools. The new
capability is called “ProcessGuard
Xtensis” because it extends the
power of “ProcessGuard” defect
management to much more process
equipment in the fab. Microtronic
will be giving “live” demonstrations
Continued on page 12
of the new system
Tuesday, July 21 | 11
