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at the virtual SEMICON West 2020
exhibition.
“The key to ProcessGuard Xtensis
– or PGX – is a very smart and fast
new analytical
software module
we call the TransImager,” said
Microtronic CEO
Reiner Fenske in
making the announcement. “In
real-time, TransImager is able to
extract and automatically analyze
wafer images
from within a
processing tool –
without the need
for recipes. It detects macro defects,
classifies wafers and transfers all
the data into Microtronic’s ProcessGuard software – which provides a
rich array of additional defect management and analysis capabilities,
both immediate and long-term. It
extends ProcessGuard intelligence to
many processes that previously had
no way to detect defects.”
Fenske noted that the core of ProcessGuard Xtensis is the company’s
well-known ProcessGuard software,
which is in daily use worldwide and
has already processed hundreds of
millions of wafers. ProcessGuard
compiles a comprehensive database
of wafer defect information from the
subject processing tool and allows
users to analyze, organize, store and
retrieve the details of every wafer
run through the tool – by lot, date
and time. The ProcessGuard database can also integrate notes and
supplemental data from other defect
inspections, microscopic analyses
and more. All of this information can
be quickly and easily accessed by
everyone in the fab.
The company pointed out the
importance of PGX speed and intelligence in spotting process excursions
these tools may already have internal
cameras that record the processing
of each wafer; however, if a particular tool does not have a built-in
camera, Microtronic can install one
and link it to the
Trans-Imager.
In addition to
wafer processing
equipment, the
Trans-Imager
can also receive
images from
SEMs and optical
microscopes,
making it much
easier to organize, file, store,
and retrieve microscope images.
Microtronic
has stated that it will be installing
ProcessGuard Xtensis capabilities
on tools currently residing within
fabs, and it also will be working
directly with equipment manufacturers who wish to offer PGX as
an option on their new processing
systems. For additional information,
visit www.microtronic.com.
immediately – allowing corrective
actions to be taken quickly, to reduce
scrap and maximize yields. The
software also provides important
new reliability-enhancing controls.
For example, the user can ink-out
a “guard-band” safety zone around
certain defects to ensure that potentially marginal die do not evade final
test and reach the customer.
Previously, ProcessGuard
capabilities had only been
OFFICES
available with EagleView™,
Gold Flag Media, 58 Summer Street,
Microtronic’s popular
Andover, MA 01810
macro defect inspection
system. Now, with the
Kerry Hoffman, Publisher
development of the Transkerryh@semiconductordigest.com
Imager, the power of Pro978-580-4205
cessGuard can be extended
Pete Singer, Editor-in-Chief
to individual processing
psinger@semiconductordigest.com
tools directly.
978-470-1806
Trans-Imager can be
linked to a number of difShannon Davis, Web and News Editor
ferent types of processing
sdavis@semiconductordigest.com
equipment, such as bonders,
Cindy Chamberlin, Art Director
etchers, metal deposition,
CMP and more. Some of
12 | Tuesday, July 21www.semiconductordigest.com
