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sponsored by
VON ARDENNE
continued from page 18
for electrical and optical layers for memory, photonics
and sensor devices, the OTPA X300 offers flexibility
to support customers from R&D through high-volume
manufacturing.
The OPTA X300 platform is installed at VON
ARDENNE’s new ISO 5 cleanroom in Dresden,
which serves as a cornerstone of its Technology and
Applications Center. This facility enables customers to
test, sample and co-develop deposition processes with
access to industry-leading engineering and materials
science expertise.
Cleanroom capabilities
The new cleanroom features 200m 2 of ISO 5 (Class
100) assembly and test bays with airborne molecular
contamination control (AMC) as well as 400m 2 of
ISO 7 cleanroom manufacturing space in Dresden. The
cleanroom is designed for semiconductor, optical and
space applications and is extreme ultraviolet (EUV)ready. The OPTA X300 will be available for customer
demos and co-development projects starting mid-2026.
“US fabs need more than tool suppliers, they need
engineering partners who understand both the equipment
and the materials science behind next-generation
devices,” said Michael Schneider, VP Semiconductor
and PrecisionOptics. “We’re bringing that integrated
expertise to the US market—helping customers unlock
new levels of performance, customization and yield.”
Also being showcased at the VON ARDENNE
SEMICON West booth are its HISS600, designed to
deliver superior uniformity and high throughput for
panel-level packaging, and VISS, a modular vertical
coating platform ideal for scaling from lab to production for substrates up to 600 mm.
RECIF Technologies Adopts Agileo Automation’s
Combined Speech Scenario and E84 PIO Box Solution
Agileo Automation (Booth 877),
a leading provider of control and
connectivity solutions for global
semiconductor manufacturing
equipment, yesterday announced
at Booth #877 at SEMICON West
2025 that RECIF Technologies
has adopted its combined Speech
Scenario and E84 PIO Box
solution to test its wafer handling
and tracking equipment for E84
and SECS/GEM compliance. The
global company headquartered
in Toulouse Blagnac, France,
which specializes in the design,
manufacturing, and installation
of automated equipment for semiconductor wafer handling, needed a
fast and effective solution to validate
the compliance of its products with
SEMI’s E84 and SECS/GEM standards before they are shipped and
implemented at customers’ semiconductor manufacturing sites all over
the world.
www.semiconductordigest.com
Speech Scenario is a software that
emulates the fab host to validate
SECS/GEM tool scenarios before
shipping brand-new production
equipment to fabs. The E84 PIO
Box is a compact and lightweight
device that serves as an interface
between Speech Scenario and E84
passive equipment. Used together,
these products allow RECIF
Technologies to generate
complete test reports that can
be communicated to its customers, ensure fast detection
of non-compliance and errors
to avoid downtime, as well as
quick and reliable SEMI E84 and
SECS/GEM compliance testing,
especially in the management
of complex cases. The company
has now better control over
host-sorter interactions, with
customizable scenarios related
to automatic carrier delivery
defined in the E84 standards.
With Speech Scenario, RECIF
teams can more effectively replicate
customer use cases when resolving
anomalies.
“We were using less flexible
software where automation messages
were not easily modifiable and old
emulation technology for validation
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